ISO 25178-607:2019
Geometrical product specifications (GPS) — Surface texture: Areal — Part 607: Nominal characteristics of non-contact (confocal microscopy) instruments
This document describes the influence quantities and instrument characteristics of confocal microscopy systems for areal measurement of surface topography. Because surface profiles can be extracted from surface topography images, the methods described in this document can be applied to profiling measurements as well.
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Foreword
Introduction
1 Scope
2 Normative references
3 Terms and definitions
4 Descriptions of the influence quantities
Annex A (informative) Classification of in-plane scanning techniques for confocal microscopes
Annex B (informative) Theory of operation of confocal microscopes
Annex C (informative) Thin and thick films with confocal microscopes
Annex D (informative) Relation to the GPS matrix model
Bibliography
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Foreword
Introduction
1 Scope
2 Normative references
3 Terms and definitions
4 Descriptions of the influence quantities
Annex A (informative) Classification of in-plane scanning techniques for confocal microscopes
Annex B (informative) Theory of operation of confocal microscopes
Annex C (informative) Thin and thick films with confocal microscopes
Annex D (informative) Relation to the GPS matrix model
Bibliography