ISO 19318:2021
Surface chemical analysis — X-ray photoelectron spectroscopy — Reporting of methods used for charge control and charge correction
This document specifies the minimum amount of information spectroscopy to be reported with the analytical results to describe the methods of charge control and charge correction in measurements of core-level binding energies for insulating specimens by X‑ray photoelectron. It also provides methods for charge control and for charge correction in the measurement of binding energies.
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Foreword
Introduction
1 Scope
2 Normative references
3 Terms and definitions
4 Symbols and abbreviated terms
5 Apparatus
6 Calibration of binding-energy scale
7 Reporting of information related to charge control
7.1 General
7.2 Information about specimen
7.2.1 Specimen form
7.2.2 Specimen dimensions
7.2.3 Specimen mounting methods
7.2.4 Specimen treatment prior to or during analysis
7.3 Instrument and operating conditions
7.4 General method for charge control
7.5 Reasons for needing charge control and for choosing the particular method for charge control
7.6 Values of experimental parameters
7.7 Information on the effectiveness of the method of charge control
7.7.1 Adequacy of charge control
7.7.2 Damage assessment
8 Reporting of method(s) used for charge correction and the value of that correction
8.1 General
8.2 Approach
8.3 Value of correction energy
Annex A (informative) Description of methods of charge control and charge correction
Bibliography
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Foreword
Introduction
1 Scope
2 Normative references
3 Terms and definitions
4 Symbols and abbreviated terms
5 Apparatus
6 Calibration of binding-energy scale
7 Reporting of information related to charge control
7.1 General
7.2 Information about specimen
7.2.1 Specimen form
7.2.2 Specimen dimensions
7.2.3 Specimen mounting methods
7.2.4 Specimen treatment prior to or during analysis
7.3 Instrument and operating conditions
7.4 General method for charge control
7.5 Reasons for needing charge control and for choosing the particular method for charge control
7.6 Values of experimental parameters
7.7 Information on the effectiveness of the method of charge control
7.7.1 Adequacy of charge control
7.7.2 Damage assessment
8 Reporting of method(s) used for charge correction and the value of that correction
8.1 General
8.2 Approach
8.3 Value of correction energy
Annex A (informative) Description of methods of charge control and charge correction
Bibliography