ISO 19606:2017
Fine ceramics (advanced ceramics, advanced technical ceramics) — Test method for surface roughness of fine ceramic films by atomic force microscopy
ISO 19606:2017 describes a method to evaluate the adequateness of a probe tip for fine-ceramic thin-film surface roughness measurements by atomic force microscopy, of surfaces with an arithmetical mean roughness, Ra, in the range of about 1 nm to 30 nm and a mean width of roughness profile elements, RSm, in the range of about 0,04 μm to 2,5 μm.
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Foreword
Introduction
1 Scope
2 Normative references
3 Terms and definitions
4 Test environment
5 Roughness measurement specimens
6 Test apparatus
6.1 Cantilever
6.2 Scanner
6.3 Specimen stage
7 Test apparatus calibration
8 Probe-tip diameter evaluation standard plate
9 Calibration of X-Y and Z scan axes
10 Probe-tip error evaluation
10.1 Outline of probe-tip error evaluation
10.2 Measurements of preliminary Ra and RSm
10.3 Evaluation of probe-tip diameter
10.4 Evaluation of error in roughness measurements
11 Roughness measurements of specimen
12 Test report
Annex A (normative) Determination of D from D’
Annex B (informative) Method to determine criteria for probe-tip error
Bibliography
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Foreword
Introduction
1 Scope
2 Normative references
3 Terms and definitions
4 Test environment
5 Roughness measurement specimens
6 Test apparatus
6.1 Cantilever
6.2 Scanner
6.3 Specimen stage
7 Test apparatus calibration
8 Probe-tip diameter evaluation standard plate
9 Calibration of X-Y and Z scan axes
10 Probe-tip error evaluation
10.1 Outline of probe-tip error evaluation
10.2 Measurements of preliminary Ra and RSm
10.3 Evaluation of probe-tip diameter
10.4 Evaluation of error in roughness measurements
11 Roughness measurements of specimen
12 Test report
Annex A (normative) Determination of D from D’
Annex B (informative) Method to determine criteria for probe-tip error
Bibliography